Journal of Chaohu University ›› 2018, Vol. 20 ›› Issue (6): 67-74.
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Abstract: As an ion generation device, ion source is widely used in the fields of accelerator, space environment and space physics, integrated circuit manufacturing, wafer production and medical treatment. Considering that most of the current domestic and foreign measuring equipment of emittance have the characteristics of pertinence and poor universality, in this paper,an embedded emittance measurement system is designed based on the functional requirements of being universal, portable and cost-effective, which mainly includes Faraday cylinder signal collection, stepper motor scanning drive, embedded microcontroller and upper computer part.
