嵌入式发射度测量系统的硬件平台设计与实现

巢湖学院学报 ›› 2018, Vol. 20 ›› Issue (6): 67-74.

嵌入式发射度测量系统的硬件平台设计与实现

摘要：离子源作为离子产生装置，在加速器、空间环境与空间物理、集成电路制造及晶片生产、医疗等领域有着广泛应用，而衡量离子源束流品质好坏的一个重要指标是其发射度。结合现在国内外大多数发射度的测量设备多具有针对性强、通用性较差的特点，论文基于通用、便携、性价比高等方面的功能要求，设计了一种嵌入式发射度测量系统，主要包括法拉第筒信号收集、步进电机扫描驱动、嵌入式微控制器和上位机部分。

1 合肥学院，安徽合肥230601
2 中国科学技术大学，安徽合肥230027

收稿日期:2018-10-04 出版日期:2018-11-25 发布日期:2018-11-25
作者简介:丁健（1971-），男，安徽宿州人。合肥学院电子信息与电气工程系，副教授。研究方向：微机控制、嵌入式系统及其应用等。
基金资助:
基金项目：安徽高校省级自然科学研究项目（项目编号：KJ2017A528）；安徽省高等学校质量工程项目（项目编号：2017jyxm0421）；合肥学院教学研究项目（2017jyxm006）。

DESIGN AND IMPLEMENTATION OF HARDWARE PLATFORM OF EMBEDDED EMITTANCE MEASUREMENT SYSTEM

Abstract: As an ion generation device, ion source is widely used in the fields of accelerator, space environment and space physics, integrated circuit manufacturing, wafer production and medical treatment. Considering that most of the current domestic and foreign measuring equipment of emittance have the characteristics of pertinence and poor universality, in this paper,an embedded emittance measurement system is designed based on the functional requirements of being universal, portable and cost-effective, which mainly includes Faraday cylinder signal collection, stepper motor scanning drive, embedded microcontroller and upper computer part.

1. Hefei University, Hefei Anhui 230601
2. University of Science and Technology of China, Hefei Anhui 230027

Received:2018-10-04 Online:2018-11-25 Published:2018-11-25
About author:DING Jian1, CHENG Jian2
Supported by:
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摘要/Abstract

摘要： 摘要：离子源作为离子产生装置，在加速器、空间环境与空间物理、集成电路制造及晶片生产、医疗等领域有着广泛应用，而衡量离子源束流品质好坏的一个重要指标是其发射度。结合现在国内外大多数发射度的测量设备多具有针对性强、通用性较差的特点，论文基于通用、便携、性价比高等方面的功能要求，设计了一种嵌入式发射度测量系统，主要包括法拉第筒信号收集、步进电机扫描驱动、嵌入式微控制器和上位机部分。

关键词: 关键词：离子源, 嵌入式, 发射度, 测量系统

Abstract: Abstract: As an ion generation device, ion source is widely used in the fields of accelerator, space environment and space
physics, integrated circuit manufacturing, wafer production and medical treatment. Considering that most of the current domestic and foreign measuring equipment of emittance have the characteristics of pertinence and poor universality, in this paper, an embedded emittance measurement system is designed based on the functional requirements of being universal, portable and cost-effective, which mainly includes Faraday cylinder signal collection, stepper motor scanning drive, embedded microcontroller and upper computer part.

Key words: Key words: ion source, embedded, emittance, measurement system

中图分类号:

TP273.5

丁健, 程健. 嵌入式发射度测量系统的硬件平台设计与实现[J]. 巢湖学院学报, 2018, 20(6): 67-74.

DING Jian, CHENG Jian. DESIGN AND IMPLEMENTATION OF HARDWARE PLATFORM OF EMBEDDED EMITTANCE MEASUREMENT SYSTEM[J]. Journal of Chaohu University, 2018, 20(6): 67-74.